AArch64 machine language Linux, 48 bytes
0: d2800020 mov x0, #0x1
4: d28001c2 mov x2, #0xe
8: 94000005 bl 1c
c: 48 65 6c 6c 6f 2c 20 77 6f 72 6c 64 21 0a 00 00
"Hello, World!\n"
1c: aa1e03e1 mov x1, x30
20: d2800808 mov x8, #0x40
24: d4000001 svc #0x0
28: d2800bc8 mov x8, #0x5e
2c: d4000001 svc #0x0
To try it out on an Aarch64 Linux server or Android device with Termux, compile and run the following C program.
const char main[]=" \0\x80\xd2\xc2\1\x80\xd2\5\0\0\x94Hello, World!\n\0\0\xe1\3\x1e\xaa\b\b\x80\xd2\1\0\0\xd4\xc8\v\x80\xd2\1\0\0\xd4"